A protective circuit includes a pair of diodes to protect the gate dielectric of an insulated-gate semiconductor device from over-voltage conditions, such as can occur during plasma etch manufacturing processes. The diodes are either anode- or cathode-coupled, and are connected between the gate of the...http://www.google.fr/patents/US6329691?utm_source=gb-gplus-shareBrevet US6329691 - Device for protection of sensitive gate dielectrics of advanced non-volatile memory devices from damage due to plasma charging
Device for protection of sensitive gate dielectrics of advanced non-volatile ...
