A method of forming a thermal bend actuator (6) is provided with upper arms (23, 25, 26) and lower arms (27, 28) which are non planar, so increasing the stiffness of the arms. The arms (23, 25, 26, 27, 28) may be spaced transversely of each other and do not overly each other in plan view, so enabling...http://www.google.fr/patents/US6625874?utm_source=gb-gplus-shareBrevet US6625874 - Method of making a thermal bend actuator
