Pressure non-linearity in a low pressure sensor device formed from a silicon diaphragm with an embedded piezoresistive transducer is reduced by using a shallow boss or thin stiffener on an ultra-thin diaphragm while the pressure sensitivity of the device is increased with corner trenches....http://www.google.fr/patents/US7997142?utm_source=gb-gplus-shareBrevet US7997142 - Low pressure sensor device with high accuracy and high sensitivity
Low pressure sensor device with high accuracy and high sensitivity
