A measuring system and apparatus is provided in which a scanning probe microscope includes a high resolution optical sensor adapted to view a portion of a workpiece beneath the scanning probe tip. Also provided is a scanning tip assembly with a cantilever/tip assembly and an optical sensor associated...http://www.google.fr/patents/US6479817?utm_source=gb-gplus-shareBrevet US6479817 - Cantilever assembly and scanning tip therefor with associated optical sensor
Cantilever assembly and scanning tip therefor with associated optical sensor
