A spreading state of an outline of the outer periphery of a coating solution is detected by a detecting sensor, and the rotation speed or the like of a wafer as a substrate is controlled so that a spreading speed of the outline becomes not more than a predetermined speed with no danger of producing a...http://www.google.fr/patents/US6485782?utm_source=gb-gplus-shareBrevet US6485782 - Coating film forming method and coating apparatus
