The object of the present invention is to transmit the position information of a defect that has been specified by means of a circuit pattern inspection apparatus quickly and precisely so that the position information is efficiently used in another apparatus. Marking is carried out on the peripheral...http://www.google.fr/patents/US20040129879?utm_source=gb-gplus-shareBrevet US20040129879 - Charged particle beam apparatus
Numéro de demande: 10/700,525 Numéro de publication: US 2004/0129879 A1 Date de dépôt: 5 nov. 2003 Brevet délivré: US7081625 ( Date de délivrance 25 juil. 2006)
