An anti-vibration apparatus has a feedback loop based on vibration information from an anti-vibration table, and a feedforward loop based on vibration information from a setting foundation. A compensation mechanism in the feedforward loop uses an adaptive filter. The adaptive filter sequentially sets...http://www.google.fr/patents/US6128552?utm_source=gb-gplus-shareBrevet US6128552 - Anti-vibration apparatus and method
