A semiconductor transducer or actuator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-back alignment...http://www.google.fr/patents/US5177579?utm_source=gb-gplus-shareBrevet US5177579 - Semiconductor transducer or actuator utilizing corrugated supports
Semiconductor transducer or actuator utilizing corrugated supports
