An air supply system for a clean room with a critical machine. An intake duct connects the exterior of the clean room to a make-up air unit, and is configured to transport external air into the make-up air unit. A first air duct connects the make-up air unit to an air conditioning cabinet including a...http://www.google.fr/patents/US7285147?utm_source=gb-gplus-shareBrevet US7285147 - Air supply systems and pressure adjustment devices for use therewith
Air supply systems and pressure adjustment devices for use therewith
