The frequency uniformity of a film bulk acoustic resonator may be improved by controlling the thickness across a wafer of one or more layers of the film bulk acoustic resonator. One or more layers of the film bulk acoustic resonator may be deposited in a way that irregularities in the deposition process...http://www.google.fr/patents/US6949268?utm_source=gb-gplus-shareBrevet US6949268 - Frequency uniformity of film bulk acoustic resonators
Frequency uniformity of film bulk acoustic resonators
