In various embodiments of the invention, a regenerating protective coating is formed on at least one surface of an interior cavity of a MEMS device. Particular embodiments provide a regenerating protective coating on one or more mirror surfaces of an interferometric light modulation device, also known...http://www.google.fr/patents/US7446926?utm_source=gb-gplus-shareBrevet US7446926 - System and method of providing a regenerating protective coating in a MEMS device
System and method of providing a regenerating protective coating in a MEMS ...
