This invention describes a surface profilometry system which measures the surface topography of a sample on a sub-nanometer scale. The surface profile is determined through measurement of the change in distance between two mirrors of a multi-pass resonant cavity that is referenced to a frequency stabilized...http://www.google.fr/patents/US5565987?utm_source=gb-gplus-shareBrevet US5565987 - Fabry-Perot probe profilometer having feedback loop to maintain resonance
Fabry-Perot probe profilometer having feedback loop to maintain resonance
