A digital probing type atomic force microscope (AFM) for measuring high aspect structures with high precision. A probe 21 is vibrated while moved to the vicinity of an atomic force region on a specimen surface. The position of the probe is measured when a specified atomic force is detected in the atomic...http://www.google.fr/patents/US20050242283?utm_source=gb-gplus-shareBrevet US20050242283 - Scanning probe microscope and specimen surface structure measuring method
Scanning probe microscope and specimen surface structure measuring method
Numéro de demande: 10/503,701 Numéro de publication: US 2005/0242283 A1 Date de dépôt: 5 févr. 2003 Brevet délivré: US7241994 ( Date de délivrance 10 juil. 2007)
