A vacuum system for an immersion exposure apparatus includes a flow passage connected to a vacuum source, and a separator provided on the flow passage. The separator separates any gas from a liquid sucked into the flow passage together with the gas....http://www.google.fr/patents/US20090180089?utm_source=gb-gplus-shareBrevet US20090180089 - Exposure apparatus and method for producing device
Exposure apparatus and method for producing device
Numéro de demande: 12/382,047 Numéro de publication: US 2009/0180089 A1 Date de dépôt: 6 mars 2009 Brevet délivré: US8089611 ( Date de délivrance 3 janv. 2012)
