In a semiconductor manufacturing system, operations of a plurality of processing apparatuses are controlled so as to efficiently manufacture semiconductor devices. The semiconductor manufacturing system having at least one processing apparatus for applying a process to semiconductor substrates. A memory...http://www.google.fr/patents/US20030153995?utm_source=gb-gplus-shareBrevet US20030153995 - Semiconductor manufacturing system and control method thereof
Semiconductor manufacturing system and control method thereof
Numéro de demande: 10/275,647 Numéro de publication: US 2003/0153995 A1 Date de dépôt: 8 nov. 2002 Brevet délivré: US6839603 ( Date de délivrance 4 janv. 2005)
