A small and highly sensitive capacitance type pressure sensor is obtained by filling an alkali halide material such as KBr into a through-hole, forming a conductive thin film on the surface, and dissolving and removing the alkali halide material. An insulating plate disposed with a through-hole...http://www.google.fr/patents/US5719740?utm_source=gb-gplus-shareBrevet US5719740 - Capacitance sensor
