Disclosed are methods and apparatus for determining whether to perform burn-in on a semiconductor product, such as a product wafer or product wafer lot. In general terms, test structures on the semiconductor product are inspected to extract yield information, such as defect densities. Since this yield...http://www.google.fr/patents/US6813572?utm_source=gb-gplus-shareBrevet US6813572 - Apparatus and methods for managing reliability of semiconductor devices
Apparatus and methods for managing reliability of semiconductor devices
