Contact assemblies, electroplating machines with contact assemblies, and methods for making contact assemblies that are used in the fabrication of microelectronic workpieces. The contact assemblies can be wet-contact assemblies or dry-contact assemblies. A contact assembly for use in an electroplating...http://www.google.fr/patents/US7048841?utm_source=gb-gplus-shareBrevet US7048841 - Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces
Contact assemblies, methods for making contact assemblies, and plating ...
