A process for manufacturing a semiconductor substrate, comprising the step of preparing a first substrate which has a surface layer portion subjected to hydrogen annealing, the separation-layer formation step of implanting ions of hydrogen or the like into the first substrate from the side of the surface...http://www.google.fr/patents/US6613678?utm_source=gb-gplus-shareBrevet US6613678 - Process for manufacturing a semiconductor substrate as well as a semiconductor thin film, and multilayer structure
Process for manufacturing a semiconductor substrate as well as a ...
