Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers are disclosed herein. In one embodiment, an ampoule includes a vessel having an interior volume configured to receive a precursor with a headspace above the precursor. The ampoule...http://www.google.fr/patents/US7584942?utm_source=gb-gplus-shareBrevet US7584942 - Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers
Ampoules for producing a reaction gas and systems for depositing materials ...
