A mass flow controller includes a mass flow sensor and a calibrator configured to perform a self-calibration on the mass flow controller. The calibrator generates flow measurements that are used as “standards” and flow measurements from the mass flow sensor are correlated to flow measurements from...http://www.google.fr/patents/US6948508?utm_source=gb-gplus-shareBrevet US6948508 - Apparatus and method for self-calibration of mass flow controller
Apparatus and method for self-calibration of mass flow controller
