An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate,...http://www.google.fr/patents/US6314823?utm_source=gb-gplus-shareBrevet US6314823 - Force detector and acceleration detector and method of manufacturing the same
Force detector and acceleration detector and method of manufacturing the same
