A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a working body (20) for transmitting an exterted force to the working...http://www.google.fr/patents/US7231802?utm_source=gb-gplus-shareBrevet US7231802 - Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing the apparatus
Apparatus for detecting a physical quantity acting as an external force and ...
