A scheme for filling plugs through chemical mechanical polishing comprises depositing a malleable conductive layer over a dielectric layer having openings formed therein. The malleable conductive layer is deposited such that a liner is formed within the openings, however the openings are not completely...http://www.google.fr/patents/US6946392?utm_source=gb-gplus-shareBrevet US6946392 - Filling plugs through chemical mechanical polish
