The method allows contact-less, precise and rapid measurement of the macroscopic shape of objects. The method is based on the Michelson-interferometer with the object mirror being replaced by the object to be measured. A low coherent light source is used. As either the reference...http://www.google.fr/patents/US5706085?utm_source=gb-gplus-shareBrevet US5706085 - Method for the non-contact rapid and accurate acquisition of the surface topology of objects
Method for the non-contact rapid and accurate acquisition of the surface ...