Visible defects are detected on a process semiconductor wafer. Defects are classified according to appearance and an association is kept between classes and apparatuses. When the density of defects in a given class exceeds a control limit the associated apparatus is switched off-line. In an embodiment,...http://www.google.fr/patents/US6242270?utm_source=gb-gplus-shareBrevet US6242270 - Method of manufacturing integrated circuits
