A gas sensor includes a substrate, a heater member formed on the base member, a gas sensitive structure formed on the heater member by a process comprising the following steps of forming a stacked layer structure on the heater member, the stacked layer structure including at least a metal-oxide semiconductor...http://www.google.fr/patents/US5250170?utm_source=gb-gplus-shareBrevet US5250170 - Gas sensor having metal-oxide semiconductor layer
