A hydrogen ion implanter for the exfoliation of silicon from silicon wafers uses a large scan wheel carrying 50+ wafers around its periphery and rotating about an axis. In one embodiment, the axis of rotation of the wheel is fixed and a ribbon beam of hydrogen ions is directed down on a peripheral edge...http://www.google.fr/patents/US7939812?utm_source=gb-gplus-shareBrevet US7939812 - Ion source assembly for ion implantation apparatus and a method of generating ions therein
Ion source assembly for ion implantation apparatus and a method of ...
