In a process for crystallizing an amorphous silicon film at a low temperature using a catalyst element, a system which automatically introduces the catalyst element into the amorphous silicon film is provided. The process steps are necessary for applying a solution containing an element which accelerates...http://www.google.fr/patents/US6074901?utm_source=gb-gplus-shareBrevet US6074901 - Process for crystallizing an amorphous silicon film and apparatus for fabricating the same
Process for crystallizing an amorphous silicon film and apparatus for ...
