A substrate provided thereon, with a film having a large number of fine grooves of a desired pattern is herein disclosed, which comprises a body of substrate and a film of at least one polymerized-condensed or crosslinked organometal compound formed on the substrate and having a large number of fine...http://www.google.fr/patents/US4810547?utm_source=gb-gplus-shareBrevet US4810547 - Substrate with fine grooves and method for manufacturing the same
Substrate with fine grooves and method for manufacturing the same