A semiconductor layer formed on one surface of a substrate is irradiated with light from the other surface of the substrate to thermally decompose part of a region of the semiconductor layer in contact with the substrate, thereby forming a thermally decomposed layer. Thereafter, the thermally decomposed...http://www.google.fr/patents/US7026261?utm_source=gb-gplus-shareBrevet US7026261 - Method for fabricating semiconductor device
