An image of a fine pattern having light-projecting portions and non-light-projecting portions is formed by illuminating the fine pattern. Upon illumination of the fine pattern, light beams are projected from respective light-projecting portions of the pattern onto an image-forming surface to form an...http://www.google.fr/patents/US5459000?utm_source=gb-gplus-shareBrevet US5459000 - Image projection method and device manufacturing method using the image projection method
Image projection method and device manufacturing method using the image ...
