A vacuum processing method and apparatus processing units for conducting processing, a transfer processing unit connected with the plurality of processing units for carrying wafers, and a control unit for controlling the processing units. A processing order information storing device stores a processing...http://www.google.fr/patents/US6853872?utm_source=gb-gplus-shareBrevet US6853872 - Operating method of vacuum processing system and vacuum processing system
Operating method of vacuum processing system and vacuum processing system
