A method and apparatus for measuring sheet resistance and thickness of thin films and substrates. A four-point probe assembly engages the surface of a film on a substrate, and the thickness of the substrate is determined from the point of contact between the probes and film. A measuring apparatus ...http://www.google.fr/patents/US5691648?utm_source=gb-gplus-shareBrevet US5691648 - Method and apparatus for measuring sheet resistance and thickness of thin films and substrates
Method and apparatus for measuring sheet resistance and thickness of thin ...
