A semiconductor substrate is manufactured in which a plurality of single crystal semiconductor layers is fixed to a base substrate having low heat resistance such as a glass substrate with a buffer layer interposed therebetween. A plurality of single crystal semiconductor substrates is prepared, each...http://www.google.fr/patents/US7842583?utm_source=gb-gplus-shareBrevet US7842583 - Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device
Method for manufacturing semiconductor substrate and method for ...
