The present invention provides techniques for processing effluent gases from vacuum fabrication processes. The effluent gases are condensed on cold surfaces (512 and 514) inside a novel pump (220) resulting in a high vacuum. The pump (220) can be connected to a vacuum fabrication processing chamber (210)...http://www.google.fr/patents/US6223540?utm_source=gb-gplus-shareBrevet US6223540 - Gas processing techniques
