A method of fabricating a large area, multi-element contactor. A segmented contactor is provided for testing semiconductor devices on a wafer that comprises a plurality of contactor units mounted to a substrate. The contactor units are formed, tested, and assembled to a backing substrate. The contactor...http://www.google.fr/patents/US20030057975?utm_source=gb-gplus-shareBrevet US20030057975 - Segmented contactor
Numéro de demande: 10/202,971 Numéro de publication: US 2003/0057975 A1 Date de dépôt: 25 juil. 2002 Brevet délivré: US6640415 ( Date de délivrance 4 nov. 2003)
