The invention provides for a pressure sensor with compensation for temperature variations. The sensor has CMOS layers deposited on a substrate, a conductive layer connected to the CMOS and a passivation layer deposited on the CMOS layers. The arrangement also includes a conductive active membrane spaced...http://www.google.fr/patents/US7841238?utm_source=gb-gplus-shareBrevet US7841238 - Pressure sensor with temperature compensation
