In a method for aligning first and second objects relative to each other, according to this invention, the first and second objects are arranged opposite to each other, and are aligned in a direction perpendicular to their opposing direction. A grating pattern is formed, as an alignment mark, on the...http://www.google.fr/patents/US4811062?utm_source=gb-gplus-shareBrevet US4811062 - Method for aligning first and second objects relative to each other and apparatus for practicing this method
Method for aligning first and second objects relative to each other and ...
