A confocal probe unit is provided with a scanning type confocal probe, which includes at least one scanning mirror, and a transparent substrate on which the at least one scanning mirror is mounted. The transparent substrate is inserted in an optical path of the confocal probe such that a light beam proceeding...http://www.google.fr/patents/US7252634?utm_source=gb-gplus-shareBrevet US7252634 - Confocal probe having scanning mirrors mounted to a transparent substrate in an optical path of the probe
Confocal probe having scanning mirrors mounted to a transparent substrate in ...
