One type of a prober for use in making measurement or aging of electric circuit elements and parts such as semiconductor integrated circuits is used for testing the electrical performance of semiconductor integrated circuit elements formed on the semiconductor substrate, and comprises a prober substrate...http://www.google.fr/patents/US5555422?utm_source=gb-gplus-shareBrevet US5555422 - Prober for semiconductor integrated circuit element wafer
Prober for semiconductor integrated circuit element wafer
