A fabrication history a group of wafers is provided, having a record for each wafer of the manufacturing events that did or did not occur in its fabrication, and having the measured value of a given target. A binary decision rule is formed based on the fabrication history, the rule being that if a wafer...http://www.google.fr/patents/US7650251?utm_source=gb-gplus-shareBrevet US7650251 - System and method for rule-based data mining and problem detection for semiconductor fabrication
System and method for rule-based data mining and problem detection for ...
