A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the substrate and the lower electrode, and an upper electrode formed on the piezoelectric film and opposing the lower electrode, an upper electrode formed on the piezoelectric...http://www.google.fr/patents/US8085115?utm_source=gb-gplus-shareBrevet US8085115 - Piezoelectric thin film resonator, filter, and communication apparatus
Piezoelectric thin film resonator, filter, and communication apparatus
