Methods of forming a tapered evanescent coupling region for use with a relatively thin silicon optical waveguide formed with, for example, an SOI structure. A tapered evanescent coupling region is formed in a silicon substrate that is used as a coupling substrate, the coupling substrate thereafter joined...http://www.google.fr/patents/US6993225?utm_source=gb-gplus-shareBrevet US6993225 - Tapered structure for providing coupling between external optical device and planar optical waveguide and method of forming the same
Tapered structure for providing coupling between external optical device and ...
