A little amount of nickel is introduced into an amorphous silicon film formed on a glass substrate to crystallize the amorphous silicon film by heating. In this situation, nickel elements remain in a crystallized silicon film. An amorphous silicon film is formed on the surface of the crystallized silicon...http://www.google.fr/patents/US6489189?utm_source=gb-gplus-shareBrevet US6489189 - Method for manufacturing a semiconductor thin film
Method for manufacturing a semiconductor thin film
