An apparatus for controlling the temperature, during testing, of IC devices formed on a wafer includes a chuck for locating the devices during testing and multiple temperature control devices arranged on the chuck to correspond with the arrangement of the devices being tested on the wafer. The chuck...http://www.google.fr/patents/US6549026?utm_source=gb-gplus-shareBrevet US6549026 - Apparatus and method for temperature control of IC device during test
Apparatus and method for temperature control of IC device during test
