A cantilever wafer paddle system for use in the manufacture of semiconductor devices so the system having two support members positioned above and attached to a suspension member such that the suspension member is capable of supporting and suspending a series of wafer boats within a diffusion tube without...http://www.google.fr/patents/US4516897?utm_source=gb-gplus-shareBrevet US4516897 - Cantilever paddle for use with wafer boats
