Fluorinated, diamond-like carbon (F-DLC) films are produced by a pulsed, glow-discharge plasma immersion ion processing procedure. The pulsed, glow-discharge plasma was generated at a pressure of 1 Pa from an acetylene (C2H2) and hexafluoroethane (C2F6) gas mixture, and the fluorinated, diamond-like...http://www.google.fr/patents/US6572937?utm_source=gb-gplus-shareBrevet US6572937 - Method for producing fluorinated diamond-like carbon films
Method for producing fluorinated diamond-like carbon films
