A method for manufacturing a piezo-resonator including: a first step of forming an upper electrode layer 20 on the piezoelectric film 14, a second step of coating the upper electrode layer 20 with a resist 21 and of performing patterning on the resist so as to have a shape of the upper electrode, a third...http://www.google.fr/patents/US7003875?utm_source=gb-gplus-shareBrevet US7003875 - Method for manufacturing piezo-resonator
