A silicon capacitive pressure transducer 34 comprising two wafers of silicon 14, 32 separated by borosilicate glass 18, 21, one of the wafers 14 having a borosilicate glass pedestal 26 thereon which is metallized 30 to provide one plate of a capacitor, the other plate of which is the surface of one of...http://www.google.fr/patents/US4405970?utm_source=gb-gplus-shareBrevet US4405970 - Silicon-glass-silicon capacitive pressure transducer
